WebJun 4, 1998 · Rutherford backscattering spectrometry (RBS) provides a unique combination of sensitivity and accuracy for characterization of thin films. Applications include analyses of composition, contamination levels, and determination of the thickness‐density product of both silicide layers and adjacent films. The large mass differences present in refractory … WebDec 1, 1984 · The use of Rutherford backscattering spectroscopy (RBS) and nuclear reaction analysis (NRA) for surface analysis is discussed. For the RBS technique, emphasis is laid on cases which are not discussed in existing review articles of the subject. The present work intends to describe a calculation procedure with the aid of which it is …
SIMNRA - Software for simulation of RBS, ERDA, NRA, MEIS and …
WebRutherford backscattering spectrometry (RBS), as a technique to address thin film properties in materials research, has evolved from classical nuclear physics experiments conducted during the first half of the previous century. In the 1960’s it was developed to a standard analysis technique particularly WebJan 1, 1987 · The basic principles, essential features and capabilities of Rutherford backscattering spectroscopy (RBS) are briefly described, and examples are given which illustrate the possibilities of RBS in various domains related to thin film analysis. Complementary methods are proposed in cases where RBS suffers some limitations in … cannot ssh azure
Rutherford Backscattering Spectrometry – RBS - Infinita …
WebDec 2, 2024 · The purpose of this study is the study of the physical parameters of a multilayer dichroic produced by PVD Magnetron Sputtering. The multilayers were designed by using a dedicated software and subsequently characterized by Rutherford Backscattering Spectrometry (RBS) in order to determine both the stoichiometry of the … WebThis article provides a detailed account of the basic concepts of Rutherford backscattering spectrometry (RBS). It begins with a description of the principles of RBS, as well as the … Webstudied by Rutherford backscattering spectroscopy (RBS) and X-ray photoelectron spectroscopy. The composition of the glass and the film … flag craft ideas